Shape-modification of patterned nanoparticles by an ion beam treatment

Title
Shape-modification of patterned nanoparticles by an ion beam treatment
Author(s)
곽진석허경찬
Keywords
SURFACE-PLASMON RESONANCE; ARRAYS; NANOCRYSTALS; MANIPULATION; LITHOGRAPHY; FABRICATION; PARTICLES
Issue Date
201502
Publisher
NATURE PUBLISHING GROUP
Citation
SCIENTIFIC REPORTS, v.5
Abstract
This paper evaluated a practical approach to the fabrication of arrays of non-spherical nanoparticles by colloidal etching without a mask involving exposure to a low energy ion beam. A spherical nanoparticle array was transferred using a soft nanolithography technique, which is a simple and effective pattern transfer method for nanostructures on the surface of thin adhesive polymers on a planar substrate, after placing the spherical nanoparticles on a patterned PDMS [poly(dimethysiloxane)] stamp produced from a patterned Si wafer. The resulting non-spherical nanoparticle array was driven from a spherical nanoparticle array shape-modified by ion beam irradiation. A well-arrayed layer of cone-like-shapes were produced using a head-on ion beam for different exposure times. Also, a variety of mushroom-like-shapes depending on the exposure angle were produced on a substrate with a well-arranged spherical nanoparticle array. This technique has potential applications in nanophotonics, field emission displays (FEDs) and microfluid.
URI
http://hdl.handle.net/YU.REPOSITORY/33590http://dx.doi.org/10.1038/srep08523
ISSN
2045-2322
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이과대학 > 물리학과 > Articles
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