Catalytic decomposition of NF<inf>3</inf> by thermal decomposition and hydrolysis of γ-Al<inf>2</inf>O<inf>3</inf>

Title
Catalytic decomposition of NF<inf>3</inf> by thermal decomposition and hydrolysis of γ-Al<inf>2</inf>O<inf>3</inf>
Author(s)
이태진김용술박노국
Issue Date
201504
Citation
Applied Chemistry for Engineering, v.26, no.2, pp.154 - 158
Abstract
In this study, the catalytic activity of ��-Al<inf>2</inf>O<inf>3</inf> was investigated for the decomposition of NF<inf>3</inf>. Reactions for NF<inf>3</inf> decomposition were carried out in the range of reaction temperature of 330��730 ��C and GHSV of 3,000��15,000 mL/g-cat?h in a fixed-bed catalytic reactor system. Thermal decomposition of NF<inf>3</inf> was also performed in order to compare with the catalytic decomposition of NF<inf>3</inf>. The conversion of NF<inf>3</inf> by the catalytic decomposition at 400 ��C was four times higher than that of the thermal decomposition. It was confirmed that the reaction behavior of NF<inf>3</inf> over ��-Al<inf>2</inf>O<inf>3</inf> exhibited two reaction pathways in the presence of steam. Fluorine in NF<inf>3</inf> over ��-Al<inf>2</inf>O<inf>3</inf> was chemically absorbed to AlF<inf>3</inf> by the gas-solid reaction in the absence of steam. The catalytic decomposition of NF<inf>3</inf> occurred by hydrolysis with steam. It was also confirmed by FT-IR analysis that NF<inf>3</inf> was completely decomposed to NOx and HF above 500 ��C. ? 2014 The Korean Society of Industrial and Engineering Chemistry. All rights reserved.
URI
http://hdl.handle.net/YU.REPOSITORY/32675http://dx.doi.org/10.14478/ace.2014.1133
ISSN
1225-0112
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공과대학 > 화학공학부 > Articles
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