Structure and Characteristics of Li-Doped NiO Thin Films Prepared by Using Pulsed-Laser Deposition Process

Title
Structure and Characteristics of Li-Doped NiO Thin Films Prepared by Using Pulsed-Laser Deposition Process
Author(s)
이재열이희영권호범
Keywords
TRANSPARENT; CUALO2; ZNO
Issue Date
201405
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.14, no.5, pp.3473 - 3476
Abstract
10 at% Li doped NiO thin films were prepared on glass and sapphire single crystal substrates by using pulsed-laser deposition (PLD) process. The effects of the substrate and the deposition temperature on the crystal structures, electrical, and optical properties of NiO thin films were studied by using XRD, 4 point probe, and UV-VIS spectrometer. The electrical conductivities and the optical properties of NiO thin films depend on the crystallinity of the thin films and substrate temperatures. The Li doped NiO thin film with electrical conductivity of 2.25 S/cm and optical transmittance of 80% was fabricated on the sapphire substrate when processing parameters were optimized.
URI
http://hdl.handle.net/YU.REPOSITORY/32317http://dx.doi.org/10.1166/jnn.2014.7805
ISSN
1533-4880
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공과대학 > 신소재공학부 > Articles
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