Transparent conducting indium zinc tin oxide thin films with low indium content deposited by radio frequency magnetron sputtering

Title
Transparent conducting indium zinc tin oxide thin films with low indium content deposited by radio frequency magnetron sputtering
Author(s)
이희영마리야느푸트리구창영이정아[이정아]김정주[김정주]
Keywords
OPTICAL-PROPERTIES; ITO FILMS; RF POWER; ZN; CRYSTALLIZATION; ORIENTATION; SYSTEM
Issue Date
201405
Publisher
ELSEVIER SCIENCE SA
Citation
THIN SOLID FILMS, v.559, pp.44 - 48
Abstract
Indium zinc tin oxide (IZTO) thin films were deposited on glass substrate by radio frequency magnetron sputtering at various substrate temperatures. The indium content of the IZTO targets was reduced from 60 at.% to 30 at.% and replaced with equal amounts of zinc and tin (20, 25, 30, and 35 at.%). The crystallinity of the as-deposited films improved with increasing substrate temperature. For all IZTO films, the onset of crystallization began at above 100 degrees C. The IZTO films deposited at higher substrate temperature showed better optical transmittance and lower electrical resistivity than those deposited at lower temperatures. The minimum electrical resistivity of approximately 8.0 Chi 10(-4) Omega.cm was observed in the IZTO films prepared deposited at 400 degrees C from targets containing 20 at.% Zn and 20 at.% Sn. The optical transmittance was above 80% for all IZTO films. On the other hand, higher co-doping resulted in amorphous films, which slightly impaired the electrical properties. The deterioration in the electrical properties of IZTO films, however, was compensated for by the higher optical transparency. Therefore, reduced-indium IZTO films are promising alternatives for some transparent conducting oxide applications. (C) 2014 Elsevier B.V. All rights reserved.
URI
http://hdl.handle.net/YU.REPOSITORY/32300http://dx.doi.org/10.1016/j.tsf.2014.02.016
ISSN
0040-6090
Appears in Collections:
공과대학 > 신소재공학부 > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE