A double-bent planar leaf flexure guide for a nano-scanner: Experimental report

Title
A double-bent planar leaf flexure guide for a nano-scanner: Experimental report
Author(s)
이동연J.W. Jeon[J.W. Jeon]J.M. Kim[J.M. Kim]이영형
Keywords
FORCE MICROSCOPE; MICROPOSITIONER; DESIGN
Issue Date
201411
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.65, no.9, pp.1493 - 1495
Abstract
We describe an experimental study on the double-bent leaf flexure-guided nano-scanner introduced in a previous paper [J. Korean Phy. Soc. 57, 1581 (2010)]. The optimally-designed nano-scanner was fabricated. Its performances were verified using a finite element analysis (FEA). The nano-scanner is actuated by a voice coil motor. Its characteristics were measured with a laser interferometer. The first resonant frequency is calculated as 17.1 Hz. The performances of the nano-scanner, including sine tracking capability, a multi-step response, and range of travel check were evaluated using various experimental procedures. Test results reveal that the scanner traveled over a 4.0 mm range and had good nano-precision (4 nm).
URI
http://hdl.handle.net/YU.REPOSITORY/30506http://dx.doi.org/10.3938/jkps.65.1493
ISSN
0374-4884
Appears in Collections:
공과대학 > 기계공학부 > Articles
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