Two-Dimensional Terahertz Photonic Crystals Fabricated by Wet Chemical Etching of Silicon

Title
Two-Dimensional Terahertz Photonic Crystals Fabricated by Wet Chemical Etching of Silicon
Author(s)
박시현김정일 [김정일 ]전석기[전석기]김근주[김근주]김재홍[김재홍]이현행[이현행]
Keywords
WAVE-GUIDES
Issue Date
201202
Publisher
SPRINGER
Citation
JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES, v.33, no.2, pp.206 - 211
Abstract
The fabrication of two-dimensional terahertz photonic crystals using wet chemical etching of high-resistivity silicon is described. Wet-etched photonic crystals with a sloped sidewall were fabricated in 16x10 square lattices with a period of 1430 mu m and a height of 150 mu m, and were bonded between two parallel Au-coated silicon wafers for tight confinement in the vertical direction. The formation of a photonic band gap at a frequency of about 0.1 THz with a width of 14 GHz is demonstrated by the experimental results and the numerical simulations of the transmission frequency spectrum for the transverse magnetic mode.
URI
http://hdl.handle.net/YU.REPOSITORY/29842http://dx.doi.org/10.1007/s10762-011-9867-5
ISSN
1866-6892
Appears in Collections:
공과대학 > 전자공학과 > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE