Electrical properties of indium-tin-oxide films treated with an intense ion beam current

Title
Electrical properties of indium-tin-oxide films treated with an intense ion beam current
Author(s)
곽진석김동호유승훈이종훈권진혁전찬욱손필국[손필국]
Keywords
THIN-FILMS; OPTICAL-PROPERTIES; PLASTIC SUBSTRATE; ITO FILMS; DEPOSITION
Issue Date
201309
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.63, no.6, pp.1156 - 1159
Abstract
The authors investigated the electrical properties of low-temperature-deposited indium-tin-oxide (ITO) films treated with an argon-ion beam (AIB) at high current density and low energy. Experimental data showed that ITO films on PET substrates treated in this manner had higher conductivity than the PET films treated thermally. X-ray diffraction indicated that the AIB ITO films had a poly-crystalline-like structure and that amorphous regions were present in PET substrates. Scanning electron microscopy (SEM) showed that the AIB ITO film surfaces had smaller cracks and exhibited dense bonding, presumably caused by instantaneous melting of ITO films by the high-current AIB beam. Consequently, the authors speculate that the effects of ion-beam treatment are driven by surface heating due to atomic collisions.
URI
http://hdl.handle.net/YU.REPOSITORY/29062http://dx.doi.org/10.3938/jkps.63.1156
ISSN
0374-4884
Appears in Collections:
이과대학 > 물리학과 > Articles
공과대학 > 화학공학부 > Articles
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