Photoresist Stripper 폐액으로부터 감압 증류에 의한 1-hydroxyethylpiperazine와 methyl diglycol 회수

Title
Photoresist Stripper 폐액으로부터 감압 증류에 의한 1-hydroxyethylpiperazine와 methyl diglycol 회수
Other Titles
Recovery of 1-hydroxyethylpiperazine and Methyl Diglycol from a Waste Photoresist Stripper by Vacuum Distillation
Author(s)
이문용구기갑[구기갑]박명준[박명준]김재경[김재경]
Keywords
Waste solvent recovery; Photoresist stripper; Vacuum distillation; HEP (1-hydroxyethylpiperazine); MDG (methyl diglycol)
Issue Date
201309
Publisher
한국폐기물자원순환학회
Citation
한국폐기물자원순환학회지, v.30, no.6, pp.520 - 528
Abstract
For the reclamation of HEP (1-hydroxyethylpiperazine) and MDG (methyl diglycol) from waste photoresist stripper,lab-scale experiments with a packed bed vacuum column were carried out. Purity of recovered solution mixture of HEP and MDG was measured to be 99.3% and recovery yield was to be 65%. Those results confirm that some organic solvents reclaimed from waste PR stripper satisfies the product specification required for the formulation of photoresist stripper.
URI
http://hdl.handle.net/YU.REPOSITORY/28904http://dx.doi.org/10.9786/kswm.2013.30.6.520
ISSN
2093-2332
Appears in Collections:
공과대학 > 화학공학부 > Articles
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