Formation of a Macro-Porous SiO2 Layer as an Anti-Reflective Coating on Glass Substrates

Title
Formation of a Macro-Porous SiO2 Layer as an Anti-Reflective Coating on Glass Substrates
Author(s)
이태진박노국김용술김민정이성현[이성현]이성훈[이성훈]
Keywords
SOLAR-CELLS; HIGH-PERFORMANCE; SILICON
Issue Date
201311
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.13, no.11, pp.7493 - 7497
Abstract
A macro-porous silica layer, consisting of a silica layer with macro-sized pores, was formed as an antireflective material on glass substrates. The silica layer and macro-pores were formed by the oxidative thermal decomposition of tetra-ethylorthorsilicate (TEOS) used as the precursor and polystyrene (PS) spherical beads used as the polymer template for the macro-pores at high temperatures. The size of pores was determined by the size of PS beads in the antireflective agent solution. The size of the PS spherical beads can be controlled by changing the concentration of styrene monomer, and the porosity of the macro pore in the silica layer could be controlled by the TEOS/PS ratio. The optimal thermal treating temperature for the formation of a macro-porous silica layer was found to be 650 degrees C. The size of the spherical type macro pores formed in the silica layer on the glass substrate was 100-150nm. UV-Vis spectrophotometry confirmed the improved antireflective properties of the glass substrate with the macro-porous silica layer.
URI
http://hdl.handle.net/YU.REPOSITORY/28619http://dx.doi.org/10.1166/jnn.2013.7907
ISSN
1533-4880
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공과대학 > 화학공학부 > Articles
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