Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials

Title
Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials
Author(s)
고태조김호찬[김호찬]이인환[이인환]진보스코
Keywords
DYNAMIC MASK; FABRICATION; TECHNOLOGY
Issue Date
201311
Publisher
KOREAN SOC PRECISION ENG
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.14, no.11, pp.1989 - 1996
Abstract
Micro-abrasive jet machining (AIM), also called micro-blasting, is a mainstream machining process that uses abrasive particles for difficult-to-cut workpieces such as glass, carbides, and ceramics. During the micro-blasting process, non-machined areas are covered by a protective mask Today, either mask fabrication practice or micro-blasting process is well suited and optimized for producing micro-features on planar workpieces. However, the demand for micro-features on three-dimensional (3-D) freeform substrates in micro electro-mechanical systems (MEMS) and lab-on-a-chip devices requires more refined non-planar micro-manufacturing techniques. We focused on devising an appropriate photoresist mask required by micro-AJM processes on the surface of a 3-D freeform workpiece. Fundamental erosion mechanisms based on SU-8 mask properties (hardness, surface roughness, and thickness) were investigated The optimal conditions were found at an ultraviolet (UV) energy of 12.0752 mu J/mu m, focus ratio of 4.8341, and hard baking time of 8.4974 min. Under these settings, the mask hardness and surface roughness were 25.04 HV and 1.14 mu m, respectively. The reliability of the fabricated mask was verified through a micro-AJM process. With existing plant conditions, the engraved micro-feature dimensions on the surface of a 3-D freeform workpiece were 535.3 mu m (width) and 11.6 mu m (depth).
URI
http://hdl.handle.net/YU.REPOSITORY/28562http://dx.doi.org/10.1007/s12541-013-0270-0
ISSN
2234-7593
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공과대학 > 기계공학부 > Articles
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