Poly-crystallinity of indium-tin-oxide films improved by using simultaneous ion beam and heat treatment of the plastic substrate

Title
Poly-crystallinity of indium-tin-oxide films improved by using simultaneous ion beam and heat treatment of the plastic substrate
Author(s)
곽진석손필국[손필국]김태형[김태형]최석원[최석원]
Keywords
THIN-FILMS; OPTICAL-PROPERTIES; ROOM-TEMPERATURE; DC; DEPOSITION; DISPLAYS
Issue Date
201208
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.61, no.4, pp.575 - 578
Abstract
The combined treatment effects of an ion beam with directionality and heat of a low temperature on a plastic substrate was investigated as a method to increase the electrical conductivity of indiumtin-oxide (ITO) films deposited on plastic substrate surfaces at low temperatures. Polyethylene terephthalate (PET) surface treatment by using an ion beam at low temperature (120 A degrees C), which can be applied to plastic substrates, improves the conductivity of ITO films. X-ray diffraction indicates that ITO films deposited on PET surfaces treated simultaneously by using an ion beam and heat of a low temperature have an almost polycrystalline structure even though they have small amorphous party on. As a supplementary measurement, the contact angle showed that the polycrystalline structure was due to a self-assembly effect at the PET surfaces. Consequently, the electrical conductivity of an ITO film deposited by using the proposed technique is three times higher than that of an ITO film treated only with heat of low temperature due to the improved polycrystalline structure.
URI
http://hdl.handle.net/YU.REPOSITORY/27542http://dx.doi.org/10.3938/jkps.61.575
ISSN
0374-4884
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이과대학 > 물리학과 > Articles
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