Pure Nano-Rotation Scanner

Title
Pure Nano-Rotation Scanner
Author(s)
이동연이무연[이무연]박은주염정국[염정국]홍동표[홍동표]
Keywords
MECHANISM; MICROPOSITIONER; ACTUATOR; DESIGN
Issue Date
201209
Publisher
HINDAWI PUBLISHING CORPORATION
Citation
ADVANCES IN MECHANICAL ENGINEERING
Abstract
We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performance is optimized. Each sector of the scanner's system was devised to have nano resolution by minimizing the parasitic errors of the rotation center that arise due to displacements other than rotation. The analytic optimal design results of the proposed scanner were verified using finite element analyses. The piezoelectric actuators were used to attain nano-resolution performances, and a capacitive sensor was used to measure displacement. A feedback controller was used to minimize the rotation errors in the rotation scanner system under practical conditions. Finally, the performance evaluation test results showed that the resonance frequency was 542 Hz, the resolution was 0.09 mu rad, and the rotation displacement was 497.2 mu rad. Our test results revealed that the rotation scanner exhibited accurate rotation about the center of the scanner and had good nano precision.
URI
http://hdl.handle.net/YU.REPOSITORY/27349http://dx.doi.org/10.1155/2012/962439
ISSN
1687-8132
Appears in Collections:
공과대학 > 기계공학부 > Articles
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