Transmission electron microscopy study of the nitridated sapphire under a mixed gas flow of nitrogen and methane

Title
Transmission electron microscopy study of the nitridated sapphire under a mixed gas flow of nitrogen and methane
Author(s)
정우식
Keywords
ALUMINUM NITRIDE; CARBOTHERMAL REDUCTION; DELTA-ALUMINA; MECHANISM; DEPOSITION; SUBSTRATE; SURFACE; EPITAXY; GROWTH; CARBON
Issue Date
201209
Publisher
CERAMIC SOC JAPAN-NIPPON SERAMIKKUSU KYOKAI
Citation
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, v.120, no.1405, pp.382 - 385
Abstract
Delta-alumina (delta-Al2O3) nanopowders and c-plane sapphires (alpha-Al2O3) were nitridated under a mixed gas flow of nitrogen and methane. The delta-Al2O3 nanopowders began to be converted to aluminum nitride (AlN) at 1300 degrees C with phase transformation to alpha-Al2O3 but were not completely converted to AlN even after 10 h at 1600 degrees C. The X-ray diffraction pattern and cross-sectional high-resolution transmission electron microscopy image of the nitridated sapphire showed the orientation relationship of AlN[0001]parallel to Al2O3[0001] in the growth and the formation of an amorphous AlOxNy interlayer between the AlN layer and the sapphire substrate. This formation strongly supported the reaction mechanism in which Al2O3 converts to AlN through solid-state intermediates in the carbothermal reduction and nitridation reaction. (C) 2012 The Ceramic Society of Japan. All rights reserved.
URI
http://hdl.handle.net/YU.REPOSITORY/27306http://dx.doi.org/10.2109/jcersj2.120.382
ISSN
1882-0743
Appears in Collections:
공과대학 > 화학공학부 > Articles
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