Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor

Title
Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor
Author(s)
정호섭박종훈[박종훈]강승오[강승오]정종현[정종현]전소영정재학김우경
Keywords
CHEMICAL-VAPOR-DEPOSITION; DECOMPOSITION; PYROLYSIS; KINETICS
Issue Date
201210
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v.51, no.10
Abstract
The computational fluid dynamics-based FLUENT program was employed to model the heat transfer and chemical reaction in a mono-silane Siemens reactor. The kinetic parameters for the 1-step overall reaction SiH4 -> Si + 2H(2), such as the pre-exponential factor, temperature coefficient, and activation energy, were carefully optimized to satisfy experimental data obtained from the 4-rod Siemens pilot reactor. Established models were successfully used to evaluate the effects of rod diameter, reaction temperature, and reactant gas flow rate on the deposition rate of silicon. (C) 2012 The Japan Society of Applied Physics
URI
http://hdl.handle.net/YU.REPOSITORY/27169http://dx.doi.org/10.1143/JJAP.51.10NA10
ISSN
0021-4922
Appears in Collections:
중앙도서관 > rims journal
공과대학 > 화학공학부 > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE