Metal based micro-feature fabrication using biomachining process

Title
Metal based micro-feature fabrication using biomachining process
Author(s)
고태조조스이스티안토아궁샴수딘사라기
Keywords
THIOBACILLUS-FERROOXIDANS; REMOVAL RATE; MICROORGANISMS
Issue Date
201210
Publisher
ELSEVIER SCIENCE BV
Citation
MICROELECTRONIC ENGINEERING, v.98, pp.561 - 565
Abstract
Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features. (C) 2012 Elsevier B.V. All rights reserved.
URI
http://hdl.handle.net/YU.REPOSITORY/27117http://dx.doi.org/10.1016/j.mee.2012.07.002
ISSN
0167-9317
Appears in Collections:
공과대학 > 기계공학부 > Articles
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