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dc.contributor.author임지석ko
dc.contributor.author정명기[정명기]ko
dc.contributor.author황서영[황서영]ko
dc.contributor.author강신일[강신일]ko
dc.date.accessioned2015-12-17T02:05:58Z-
dc.date.available2015-12-17T02:05:58Z-
dc.date.created2015-11-13-
dc.date.issued201211-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.30, no.6-
dc.identifier.issn1071-1023-
dc.identifier.urihttp://hdl.handle.net/YU.REPOSITORY/27007-
dc.identifier.urihttp://dx.doi.org/10.1116/1.4767639-
dc.description.abstractOptical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 x 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 x 1 mm(2) images were examined using an XY-translation nanostage scanning with a travel length of 100 mu m. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4767639]-
dc.language영어-
dc.publisherA V S AMER INST PHYSICS-
dc.subjectMOLD INSERT-
dc.subjectFABRICATION-
dc.subjectMICROLENS-
dc.subjectREPLICATION-
dc.titleDevelopment of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy-
dc.typeArticle-
dc.identifier.wosid000311667300029-
dc.identifier.scopusid2-s2.0-84870318650-
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공과대학 > 기계공학부 > Articles
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