Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Title
Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy
Author(s)
임지석정명기[정명기]황서영[황서영]강신일[강신일]
Keywords
MOLD INSERT; FABRICATION; MICROLENS; REPLICATION
Issue Date
201211
Publisher
A V S AMER INST PHYSICS
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.30, no.6
Abstract
Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 x 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 x 1 mm(2) images were examined using an XY-translation nanostage scanning with a travel length of 100 mu m. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4767639]
URI
http://hdl.handle.net/YU.REPOSITORY/27007http://dx.doi.org/10.1116/1.4767639
ISSN
1071-1023
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공과대학 > 기계공학부 > Articles
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