Preparation of anodic aluminum oxide (AAO) nano-template on silicon and its application to one-dimensional copper nano-pillar array formation

Title
Preparation of anodic aluminum oxide (AAO) nano-template on silicon and its application to one-dimensional copper nano-pillar array formation
Author(s)
박진호심람무하마드바사무바라크알리김동욱민봉기고정빈
Keywords
POROUS ALUMINA; AL2O3 FILMS; FABRICATION; GROWTH; NANOSTRUCTURES; NANOPARTICLES; ANODIZATION; NANOWIRES; MECHANISM; PORES
Issue Date
201301
Publisher
KOREAN INSTITUTE CHEMICAL ENGINEERS
Citation
KOREAN JOURNAL OF CHEMICAL ENGINEERING, v.30, no.1, pp.221 - 227
Abstract
Anodized aluminum oxide (AAO) nanotemplates were prepared using the Al/Si substrates with an aluminum layer thickness of about 300 nm. A two-step anodization process was used to prepare an ordered porous alumina nanotemplate, and the pores of various sizes and depths were constructed electrochemically through anodic oxidation. The optimum morphological structure for large area application was constructed by adjusting the applied potential, temperature, time, and electrolyte concentration. SEM investigations showed that hexagonal-close-packed alumina nano-pore arrays were nicely constructed on Si substrate, having smooth wall morphologies and well-defined diameters. It is also reported that one dimensional copper nanopillars can be fabricated using the tunable nanopore sized AAO/Si template, by controlling the copper deposition process.
URI
http://hdl.handle.net/YU.REPOSITORY/26852http://dx.doi.org/10.1007/s11814-012-0124-y
ISSN
0256-1115
Appears in Collections:
공과대학 > 화학공학부 > Articles
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