Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature

Title
Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature
Author(s)
곽진석손필국[손필국]최석원[최석원]김성수[김성수]
Keywords
INDIUM-TIN-OXIDE; THIN-FILMS; POLYMER; DC; DEPOSITION
Issue Date
201212
Publisher
WILEY-BLACKWELL
Citation
SURFACE AND INTERFACE ANALYSIS, v.44, no.13, pp.1606 - 1610
Abstract
In this paper, we investigate poly-crystal indium tin oxide (ITO) film produced by a multi-step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X-ray diffraction indicates that the ITO film deposited by our multi-step ion beam treatment has an almost poly-crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly-crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar?<?0.7%) with the multi-step ion beam treatment is eight times higher than that of single-treated ITO film, due to this poly-crystal structure. Copyright (C) 2012 John Wiley & Sons, Ltd.
URI
http://hdl.handle.net/YU.REPOSITORY/26746http://dx.doi.org/10.1002/sia.5097
ISSN
0142-2421
Appears in Collections:
이과대학 > 물리학과 > Articles
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