Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Title
Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target
Author(s)
손선영Kim, Hwa-Min[Kim, Hwa-Min]Bae, Kang[Bae, Kang]
Keywords
ELECTRICAL-PROPERTIES; IN2O3-ZNO FILMS; TRANSPARENT; ZNO; SENSORS
Issue Date
201104
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v.50, no.4
Abstract
Indium zinc oxide (IZO) films were deposited on glass substrates using the rf-magnetron sputtering method and a powder target made up of nanoparticles with a size less than 100 nm. In this study, the optical, structural, and electrical properties of the IZO films deposited using a nanopowder target compared with those of the IZO films deposited using a micropowder target made up of microparticles with a size greater than 30 mu m were examined. The IZO films deposited using nanopowder at room temperature were amorphous and showed a low resistivity of 4.5 x 10(-4) Omega.cm and a high transmittance over an average of 85% in the visible range, indicating that these films showed more enhanced properties than the IZO film deposited using micropowder. The enhanced properties of the IZO film prepared with nanopowder were considered to be caused by the marked improvement in packing density with increases in refractive index and surface roughness from atomic force microscopy (AFM) images due to the powder target consisting of nanoparticles. (C) 2011 The Japan Society of Applied Physics
URI
http://hdl.handle.net/YU.REPOSITORY/25383http://dx.doi.org/10.1143/JJAP.50.045801
ISSN
0021-4922
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기초교육대학 > 교양학부 > Articles
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