Electrical and Optical Properties of Cd2SnO4 Thin Film Depending on its Chemical Bond

Title
Electrical and Optical Properties of Cd2SnO4 Thin Film Depending on its Chemical Bond
Author(s)
전찬욱정우진[정우진]이상환[이상환]박순용[박순용]이은우[이은우]배준학[배준학]박래만[박래만]김제하[김제하]
Keywords
CADMIUM STANNATE; OXIDE; DEPOSITION; TIN
Issue Date
201110
Publisher
TAYLOR & FRANCIS LTD
Citation
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.551, pp.123 - 129
Abstract
Cd2SnO4(CTO) thin film was made using RF magnetron sputtering and a single (CTO) target. Among various deposition variables, the effect of changes in plasma power on the electrical and optical properties of the film was investigated. It was observed, as plasma power grows, specific resistivity of the thin film increases while transmittance considerably decreases. It was found that such a phenomenon occurred because of the density of the thin film reduced by increased deposition speed. Another noteworthy result obtained through the X-ray photoelectron spectroscopy analysis is that Sn has metallic bond in the case of the thin film deposited under high power. It seems that existence of such metal was another cause of the reduced transmittance of the thin film.
URI
http://hdl.handle.net/YU.REPOSITORY/24432http://dx.doi.org/10.1080/15421406.2011.600628
ISSN
1542-1406
Appears in Collections:
공과대학 > 화학공학부 > Articles
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