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dc.contributor.author김수현ko
dc.contributor.authorQuanli Hu[Quanli Hu]ko
dc.contributor.author김형준[김형준]ko
dc.contributor.author이현호[이현호]ko
dc.contributor.author김용상[김용상]ko
dc.contributor.author유두열[유두열]ko
dc.contributor.author김기범[김기범]ko
dc.contributor.author윤태식[윤태식]ko
dc.contributor.author엄태광ko
dc.date.accessioned2015-12-17T00:42:21Z-
dc.date.available2015-12-17T00:42:21Z-
dc.date.created2015-11-13-
dc.date.issued201008-
dc.identifier.citationELECTROCHEMICAL AND SOLID STATE LETTERS, v.13, no.11, pp.H366 - H369-
dc.identifier.issn1099-0062-
dc.identifier.urihttp://hdl.handle.net/YU.REPOSITORY/23854-
dc.identifier.urihttp://dx.doi.org/10.1149/1.3479548-
dc.description.abstractThe formation of a vertically and laterally self-aligned double layer of CdSe colloidal nanocrystals (NCs) in a nanopatterned dielectric layer on Si substrate was demonstrated by a repeating dip-coating process for NC deposition and atomic layer deposition (ALD) of Al(2)O(3) layer. A nanopatterned SiO(2)/Si substrate was formed by patterning with a self-assembled diblock copolymer. After the selective deposition of the first NC layer inside the SiO(2) nanopattern by dip-coating, an Al(2)O(3) interdielectric layer and the second NC layer in the Al(2)O(3) nanopattern were sequentially deposited. The capacitance voltage measurement of an Al-gate/ALD-Al(2)O(3)(25 nm)/seconcl-CdSe-NCs/ALD-Al(2)O(3)(2 nm)/first-CdSe-NCs/nanopattemed-SiO(2)(15 nm)/p-Si substrate structure showed the flatband voltage shift through the charge transport between the gate and NCs. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3479548] All rights reserved.-
dc.language영어-
dc.publisherELECTROCHEMICAL SOC INC-
dc.subjectCOLLOIDAL NANOCRYSTALS-
dc.subjectNONVOLATILE MEMORY-
dc.subjectSI-
dc.subjectNANOPARTICLES-
dc.titleVertically and Laterally Self-Aligned Double Layer of Nanocrystals in Nanopatterned Dielectric Layer for Nanocrystal Floating Gate Memory Device-
dc.typeArticle-
dc.identifier.wosid000283193300024-
dc.identifier.scopusid2-s2.0-77956606409-
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공과대학 > 신소재공학부 > Articles
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