Electrical and Optical Properties of Cadmium Stannate Deposited by RF Magnetron Sputtering

Title
Electrical and Optical Properties of Cadmium Stannate Deposited by RF Magnetron Sputtering
Author(s)
전찬욱이상환[이상환]이은우[이은우]박순용[박순용]
Keywords
FILMS; CD2SNO4; OXIDE
Issue Date
201011
Publisher
TAYLOR & FRANCIS LTD
Citation
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.532, pp.522 - 527
Abstract
CTO (Cadmium Stannate) thin films, one of TCOs (Transparent Conducting Oxide) having a potential application for photovoltaic or display product, were prepared by using rf magnetron sputtering system. The lowest resistivity of CTO thin film deposited at room temperature was 6.6 x 10(-4) ohm.cm with carrier mobility of 9.1 cm(2)/Vs and carrier concentration of 10.4 x 10(20) cm(-3). The average transmittance of CTO thin film was found to be over 80% regardless of deposition condition. The transmittance of the annealed CTO thin film at 600 degrees C in air atmosphere, was found to increase upto more than 90%, but the film resistivity degraded by two order of magnitude due to the decreased carrier concentration with minor increase of carrier mobility.
URI
http://hdl.handle.net/YU.REPOSITORY/23410http://dx.doi.org/10.1080/15421406.2010.497045
ISSN
1542-1406
Appears in Collections:
공과대학 > 화학공학부 > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE