주사탐침현미경을 위한 정밀 구조 설계

Title
주사탐침현미경을 위한 정밀 구조 설계
Other Titles
Precision-structural Design for Scanning Probe Microscopes
Author(s)
이무연[이무연]심재술이동연
Keywords
Structural frame design; Scanning probe microscope; Vibration isolator; Transmissibility; Structural frame design; Scanning probe microscope; Vibration isolator; Transmissibility
Issue Date
201011
Publisher
한국산학기술학회
Citation
한국산학기술학회논문지, v.11, no.11, pp.4095 - 4099
Abstract
Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.
URI
http://hdl.handle.net/YU.REPOSITORY/23329
ISSN
1975-4701
Appears in Collections:
공과대학 > 기계공학부 > Articles
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