A Double-bent Planar Leaf Flexure Guide for a Nano-scanner

Title
A Double-bent Planar Leaf Flexure Guide for a Nano-scanner
Author(s)
박은주[박은주]심재술이동연이재원
Issue Date
201012
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.57, no.6, pp.1581 - 1588
Abstract
A new planar (xy theta(z)) flexure guide that is capable of large travel and nano-resolution is presented. The theoretical stiffness equation of the planar flexure guide is derived using Castigliano's theorem and verified via a finite element analysis. As an application of the planar flexure guide, a monolithic planar nano-scanner is presented, analyzed, and optimally designed. To find the sensitive parameters for the optimal design, are performed parametric analyses. The objective for the optimal design was to maximize the resonance for fast speed while maintaining a large range of travel, a compact size, and a high resolution. The optimal design results were verified by using a finite element analysis.
URI
http://hdl.handle.net/YU.REPOSITORY/23293http://dx.doi.org/10.3938/jkps.57.1581
ISSN
0374-4884
Appears in Collections:
공과대학 > 기계공학부 > Articles
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