A Compact Vertical Scanner for Atomic Force Microscopes

Title
A Compact Vertical Scanner for Atomic Force Microscopes
Author(s)
박재홍[박재홍]심재술이동연
Keywords
SPEED; DESIGN
Issue Date
201012
Publisher
MDPI AG
Citation
SENSORS, v.10, no.12, pp.10673 - 10682
Abstract
A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner's performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
URI
http://hdl.handle.net/YU.REPOSITORY/23261http://dx.doi.org/10.3390/s101210673
ISSN
1424-8220
Appears in Collections:
공과대학 > 기계공학부 > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE