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dc.contributor.other학교법인 영남학원ko
dc.date.accessioned2015-12-16T15:34:00Z-
dc.date.available2015-12-16T15:34:00Z-
dc.date.issued20051214-
dc.identifier.urihttp://hdl.handle.net/YU.REPOSITORY/21395-
dc.title실리콘 웨이퍼의 산화막 상의 팔라디움촉매 형성방법-
dc.typePatent-
dc.identifier.registno10-0537944-
dc.date.regist2005-12-14-
dc.identifier.applicationno10-2003-0076349-
dc.date.application2003-10-30-
dc.contributor.creator민봉기ko
dc.contributor.creator신현준ko
dc.contributor.creator최순돈ko
dc.contributor.creator장훈식ko
dc.contributor.creator이상기ko
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공과대학 > 신소재공학부 > Patents
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