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Issue DateTitleAuthor(s)
201011Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films김수현; 이도중[이도중]; 김현미[김현미]; 권장연[권장연]; 최효지[최효지]; 김기범[김기범]
201011Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma김수현; 엄태광; 윈두사리; 김훈[김훈]
201501Highly Conformal Amorphous W-Si-N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization김수현; 홍태은[홍태은]; 정재훈; 여승민; 천태훈; 배소익; 여소정[여소정]; 김효석[김효석]; 정택모[정택모]; 박보근[박보근]; 김창균[김창균]; 이도중[이도중]
201501Synthesis of carbon nanotube-nickel nanocomposites using atomic layer deposition for high-performance non-enzymatic glucose sensing김수현; 최태진[최태진]; 김수현[김수현]; 이창완[이창완]; 김한길; 최상경; 김은경[김은경]; 박주상[박주상]; 김형준[김형준]
201404ZnO homojunction core-shell nanorods ultraviolet photo-detecting diodes prepared by atomic layer deposition김수현; 고경용[고경용]; 강혜민[강혜민]; 박주상[박주상]; 민병욱[민병욱]; 이희성[이희성]; 임성일[임성일]; 강지연[강지연]; 명재민[명재민]; 정재훈; 김형준[김형준]
201401TaCx Thin Films Prepared by Atomic Layer Deposition as Diffusion Barriers for Cu Metallization김수현; 홍태은[홍태은]; 김태호; 정재훈; 김훈[김훈]
201101Controlling spatial density and size of nanocrystals by two-step atomic layer deposition김수현; 이도중[이도중]; 임성수[임성수]; 김기수[김기수]; 김기범[김기범]
201108Synthesis of Si Nanowires by Using Atmospheric Pressure Chemical Vapor Deposition with SiCl4김수현; 천태훈; 최태진[최태진]; 김형준[김형준]; 김도영[김도영]
201104Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]
201103Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films김수현; 이도중[이도중]; 권장연[권장연]; 김현미[김현미]; 김기범[김기범]

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