Browsing by Author 최상혁

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2013-03Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2김수현; 홍태은[홍태은]; 최상혁; 여승민; 박지윤; 천태훈[천태훈]; 김훈[김훈]; 김민규[김민규]; 김형준[김형준]
2013-11Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization김수현; 여승민; 박지윤; 최상혁; 천태훈[천태훈]; 임병용[임병용]; 김선정[김선정]
2011-05Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects김수현; 윈두사리; 엄태광; 최상혁