Browsing by Author 최상혁[최상혁]

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2011-03Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects김수현; 천태훈[천태훈]; 최상혁[최상혁]; 강대환[강대환]
2011-04Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]