Browsing by Author 천태훈[천태훈]

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Showing results 1 to 8 of 8

Issue DateTitleAuthor(s)
2011-10ALD-Grown Al2O3 as a Diffusion Barrier for Stainless Steel Substrates for Flexible Cu(InGa)Se-2 Solar Cells박현욱[박현욱]; 김성철[김성철]; 배해철[배해철]; 천태훈[천태훈]; 김수현; 김우경
2012-07Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant김수현; 문기영; 최상경; 박지윤; 천태훈[천태훈]; 김우경; 임병용[임병용]; 김선정[김선정]; 홍태은[홍태은]
2013-03Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2김수현; 홍태은[홍태은]; 최상혁; 여승민; 박지윤; 천태훈[천태훈]; 김훈[김훈]; 김민규[김민규]; 김형준[김형준]
2011-03Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects김수현; 천태훈[천태훈]; 최상혁[최상혁]; 강대환[강대환]
2013-11Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization김수현; 여승민; 박지윤; 최상혁; 천태훈[천태훈]; 임병용[임병용]; 김선정[김선정]
2013-05Characteristics ofMoSe(2) formation during rapid thermal processing ofMo-coated glass이수빈; 구자석; 김삼미; 김수현; 천태훈[천태훈]; 오종석[오종석]; 김석진[김석진]; 김우경
2013-04Growth of Highly Conformal TiCx Films Using Atomic Layer Deposition Technique김수현; 홍태은[홍태은]; 최상경; 천태훈[천태훈]
2011-04Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]