Browsing by Author 이도중[이도중]

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Showing results 1 to 10 of 10

Issue DateTitleAuthor(s)
2013-08Atomic layer deposition of Ti-doped ZnO films with enhanced electron mobility김수현; 이도중[이도중]; 권장연[권장연]; 김기범[김기범]; Jimmy Xu[Jimmy Xu]; 김기주[김기주]
2011-01Controlling spatial density and size of nanocrystals by two-step atomic layer deposition김수현; 이도중[이도중]; 임성수[임성수]; 김기수[김기수]; 김기범[김기범]
2011-03Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films김수현; 이도중[이도중]; 권장연[권장연]; 김현미[김현미]; 김기범[김기범]
2014-10Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition김수현; 박지윤; 여승민; 천태훈; 김민규[김민규]; 김형준[김형준]; 홍태은[홍태은]; 이도중[이도중]
2015-01Highly Conformal Amorphous W-Si-N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization김수현; 홍태은[홍태은]; 정재훈; 여승민; 천태훈; 배소익; 여소정[여소정]; 김효석[김효석]; 정택모[정택모]; 박보근[박보근]; 김창균[김창균]; 이도중[이도중]
2015-09Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor김수현; 김한길; 이민영; 배소익[배소익]; 고경용[고경용]; 김형준[김형준]; 권경우[권경우]; 황진하[황진하]; 이도중[이도중]
2010-01Nonvolatile memory characteristics of atomic layer deposited Ru nanocrystals with a SiO2/Al2O3 bilayered tunnel barrier김수현; 이도중[이도중]; 임성수[임성수]; 김기수[김기수]; 김기범[김기범]
2015-04Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen김수현; 여승민; 박지윤; 이승준; 이도중[이도중]; 서종현[서종현]
2010-11Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films김수현; 이도중[이도중]; 김현미[김현미]; 권장연[권장연]; 최효지[최효지]; 김기범[김기범]
2014-01Ultrasmooth, High Electron Mobility Amorphous In-Zn-O Films Grown by Atomic Layer Deposition김수현; 이도중[이도중]; 권장연[권장연]; 김지연[김지연]; 김기주[김기주]; 조영호[조영호]; 조성용[조성용]; Jummy Xu[Jummy Xu]; 김기범[김기범]