Browsing by Author 윈두사리

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2012-10A bilayer diffusion barrier of Ru/WSixNy for advanced Cu interconnects김수현; 엄태광; 윈두사리; 천태훈; 김우경
2010-11Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma김수현; 엄태광; 윈두사리; 김훈[김훈]
2011-05Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects김수현; 윈두사리; 엄태광; 최상혁