Browsing by Author 엄태광

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Showing results 1 to 7 of 7

Issue DateTitleAuthor(s)
2012-10A bilayer diffusion barrier of Ru/WSixNy for advanced Cu interconnects김수현; 엄태광; 윈두사리; 천태훈; 김우경
2011-10Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu김수현; 엄태광; 강대환[강대환]; 김훈[김훈]
2010-11Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition김수현; 엄태광; 박계순[박계순]; 김선정[김선정]; 김훈[김훈]
2010-11Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma김수현; 엄태광; 윈두사리; 김훈[김훈]
2011-05Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma김수현; 김태호; 엄태광; 강대환[강대환]; 김훈[김훈]; 유상호[유상호]; 임진묵[임진묵]
2011-05Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects김수현; 윈두사리; 엄태광; 최상혁
2010-08Vertically and Laterally Self-Aligned Double Layer of Nanocrystals in Nanopatterned Dielectric Layer for Nanocrystal Floating Gate Memory Device김수현; Quanli Hu[Quanli Hu]; 김형준[김형준]; 이현호[이현호]; 김용상[김용상]; 유두열[유두열]; 김기범[김기범]; 윤태식[윤태식]; 엄태광

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