Browsing by Author 서종현[서종현]

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2015-09Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization김수현; 최상경; 김한길; 김준범; 천태훈; 서종현[서종현]
2015-04Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen김수현; 여승민; 박지윤; 이승준; 이도중[이도중]; 서종현[서종현]