Browsing by Author 박영배[박영배]

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2013-12Effects of AlOx incorporation into atomic layer deposited Ru thin films: Applications to Cu direct plating technology김수현; 홍태은[홍태은]; 천태훈; 김정규[김정규]; 박영배[박영배]; 김명준[김명준]; 권오중[권오중]; 김재정[김재정]
2012-05Interfacial Adhesion Energy of Ru-AlO Thin Film Deposited by Atomic Layer Deposition between Cu and SiO2: Effect of the Composition of Ru-AlO Thin Film김수현; 천태훈; 박영배[박영배]; 김정규[김정규]