Browsing by Author 문기영

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2012-07Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant김수현; 문기영; 최상경; 박지윤; 천태훈[천태훈]; 김우경; 임병용[임병용]; 김선정[김선정]; 홍태은[홍태은]
2015-07Growth characteristics of graphene synthesized via chemical vapor deposition using carbon tetrabromide precursor김수현; 최태진[최태진]; 정한얼[정한얼]; 이창완[이창완]; 문기영; 박주상[박주상]; 김형준[김형준]
2014-07The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect김수현; 문기영; 홍태은[홍태은]; 천태훈; 장유진; 임병용[임병용]; 김선정[김선정]