Browsing by Author 김훈[김훈]

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Showing results 1 to 6 of 6

Issue DateTitleAuthor(s)
2013-03Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2김수현; 홍태은[홍태은]; 최상혁; 여승민; 박지윤; 천태훈[천태훈]; 김훈[김훈]; 김민규[김민규]; 김형준[김형준]
2011-10Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu김수현; 엄태광; 강대환[강대환]; 김훈[김훈]
2010-11Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition김수현; 엄태광; 박계순[박계순]; 김선정[김선정]; 김훈[김훈]
2010-11Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma김수현; 엄태광; 윈두사리; 김훈[김훈]
2011-05Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma김수현; 김태호; 엄태광; 강대환[강대환]; 김훈[김훈]; 유상호[유상호]; 임진묵[임진묵]
2014-01TaCx Thin Films Prepared by Atomic Layer Deposition as Diffusion Barriers for Cu Metallization김수현; 홍태은[홍태은]; 김태호; 정재훈; 김훈[김훈]