Browsing by Author 김태호

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2011-05Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma김수현; 김태호; 엄태광; 강대환[강대환]; 김훈[김훈]; 유상호[유상호]; 임진묵[임진묵]
2014-01TaCx Thin Films Prepared by Atomic Layer Deposition as Diffusion Barriers for Cu Metallization김수현; 홍태은[홍태은]; 김태호; 정재훈; 김훈[김훈]

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