Browsing by Author 김창균[김창균]

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Issue DateTitleAuthor(s)
2015-01Highly Conformal Amorphous W-Si-N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization김수현; 홍태은[홍태은]; 정재훈; 여승민; 천태훈; 배소익; 여소정[여소정]; 김효석[김효석]; 정택모[정택모]; 박보근[박보근]; 김창균[김창균]; 이도중[이도중]

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