Browsing by Author 김선정[김선정]

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Showing results 1 to 7 of 7

Issue DateTitleAuthor(s)
2012-07Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant김수현; 문기영; 최상경; 박지윤; 천태훈[천태훈]; 김우경; 임병용[임병용]; 김선정[김선정]; 홍태은[홍태은]
2013-11Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization김수현; 여승민; 박지윤; 최상혁; 천태훈[천태훈]; 임병용[임병용]; 김선정[김선정]
2011-09Electrochemical Formation of Cu Nanowires on W Surface Patterned by Atomic Force Microscope Tip김수현; 김선정[김선정]; 박계순[박계순]
2010-11Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition김수현; 엄태광; 박계순[박계순]; 김선정[김선정]; 김훈[김훈]
2011-03Icilin induces G1 arrest through activating JNK and p38 kinase in a TRPM8-independent manner전주홍[전주홍]; 박현호; 김수화[김수화]; 김성영[김성영]; 박은정[박은정]; 김준[김준]; 서인석[서인석]; 김선정[김선정]
2014-07The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect김수현; 문기영; 홍태은[홍태은]; 천태훈; 장유진; 임병용[임병용]; 김선정[김선정]
2011-04Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]