Browsing by Author 강대환[강대환]

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Showing results 4 to 4 of 4

Issue DateTitleAuthor(s)
2011-04Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]

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