Browsing by Author 강대환[강대환]

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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
2011-03Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects김수현; 천태훈[천태훈]; 최상혁[최상혁]; 강대환[강대환]
2011-10Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu김수현; 엄태광; 강대환[강대환]; 김훈[김훈]
2011-05Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma김수현; 김태호; 엄태광; 강대환[강대환]; 김훈[김훈]; 유상호[유상호]; 임진묵[임진묵]
2011-04Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating김수현; 최상혁[최상혁]; 천태훈[천태훈]; 강대환[강대환]; 박계순[박계순]; 김선정[김선정]

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